Laboratory Pecvd Coater for The Preparation of Amorphous Silicon and Microcrystalline Silicon Thin Film Solar Cell Devices

Laboratory Pecvd Coater for The Preparation of Amorphous Silicon and Microcrystalline Silicon Thin Film Solar Cell Devices

laboratory PECVD coater for the preparation of amorphous silicon and microcrystalline silicon slender movie photo voltaic cell gadgets


Introduction of PECVD coater:

CY-PECVD-450 chemical vapor deposition adopts plasma enhanced chemical vapor deposition technology, which can use large-strength plasma to advertise the response approach, effectively enhance the reaction pace and minimize the response temperature.

It is suited for depositing thin films of silicon nitride, amorphous silicon and microcrystalline silicon on different substrates this kind of as optical glass, silicon, quartz and stainless steel. It has excellent movie-forming good quality, significantly less pinholes and is not simple to crack. It is appropriate for the preparing of amorphous silicon and microcrystalline silicon slim movie solar mobile devices. It can be extensively utilised in the scientific analysis and tiny batch preparing of thin film supplies in Faculties and universities and scientific study institutes.

CZPT parameters of PECVD coater:



Vacuum chamber

entrance opening doorway,φ300mm X 300mm,stainless steel

viewing window:φ100mm with baffle

Vacuum pump set

Front stage pump: rotary vane pump pumping velocity is one.1L/s

Secondary pump: Turbo molecular pump pumping velocity 600L/s

Limiting vacuum


10fourPa(In 30 minutes)


.133~133Pa,modified in accordance to the process

RF electrical power

13.56MHz,500W (automatch)

Flow control

 mass flowmeter(default Ar,~200sccm)


1100mm x 800mm x1100mm


Element images of PECVD coater:

Launched in 2005, HangZhou CY CZPT CZPT Co., Ltd. is a firm specializing in the advancement and generation of laboratory technological innovation research gear. The goods are blended, pressed, burned, reduce, floor, polished, coated, analytical tools and associated consumables. CZPT contain laboratory sintering tools, coating tools and so on. At present, it has been exported to 25 nations around the world and regions these kinds of as the CZPT States, CZPTe, and CZPT Asia, and has been properly acquired by numerous scientific research units.

We have a mature technological innovation research and advancement team, the amount of specialists is 33, the firm has a hundred and fifty men and women, a lot more than 500 square meters of place of work area, the manufacturing unit handles an location of about 1,five hundred sq. meters located in HangZhou Substantial-tech Zone CZPTtronic CZPT Park. The items are primarily situated in the research market place, serving scientific study in the labs of universities and faculties, and can also customise merchandise in accordance to your needs.

Q. Are you a producer or a investing company?

A. We are skilled laboratory instrument makers, have their personal style team and factory, have experienced technological knowledge, and can ensure the good quality of merchandise and the optimal price tag.

Q. How is your company’s item after-sales support method?

A. The item warranty interval is 12 months, we can give lifetime servicing. We have specialist pre-income and after-income departments that can respond to you inside 24 several hours to solve any technical problems.

Q. How prolonged is your shipping and delivery time? If I want to customize the instrument, how lengthy does it take?

A.1. If the products are in stock, it is five-10 days. two. We can offer CZPT companies for our customers. It typically takes thirty-60 days relying on the requirements of the custom instrument.

Q. Our country’s electrical power offer and plug are different. How do you resolve it?

A. We can provide a transformer and plug according to your nearby needs in accordance to the energy plug of various international locations.

Q. How to shell out?

A.T / T, L / C, D / P, and so forth., it is advisable to use Alibaba CZPT Promise.

Q. How is the package deal of merchandise? Supply techniques? Common export fumigation indicator wood box packaging two. Express, air, sea transport according to client specifications, find the most ideal way.

A lot more inquiries, you should speak to buyer service

Laboratory Pecvd Coater for The Preparation of Amorphous Silicon and Microcrystalline Silicon Thin Film Solar Cell Devices